Home > The research team of Institute of Acoustics, Chinese Academy of Sciences prepared vanadium-doped ZnO thin films with high piezoelectric properties
The research team of Institute of Acoustics, Chinese Academy of Sciences prepared vanadium-doped ZnO thin films with high piezoelectric properties
Author：Acoustics Industry Innovation and Development Conference Date：2021-08-18 Reading：113
近日，中科院声学所超声学实验室李俊红研究员团队采用改良溶胶-凝胶法制备出高压电性能的掺钒ZnO薄膜。测试结果表明，优化后的薄膜的制备技术能使薄膜成分分布更加均匀，且掺杂更加充分，因此能更大程度地提高薄膜的压电性能。将这种高性能掺杂氧化锌压电薄膜应用到硅微压电传声器、薄膜体声波谐振器、压电微机械超声换能器、MEMS水听器等器件中可大大提高这些器件的性能，推动这些器件在移动通讯、医用超声成像、水下目标探测等方面的应用。
Directed by
Ministry of Science and Technology
China Association for Science and Technology
China Association for Science and Technology
Supported by
Jiangsu Development and Reform Commission
Jiangsu Department of Science and Technology
Jiangsu Department of Industry and Information Technology
Jiangsu Department of Commerce
Jiangsu Association for Science and Technology
Jiangsu Department of Science and Technology
Jiangsu Department of Industry and Information Technology
Jiangsu Department of Commerce
Jiangsu Association for Science and Technology
Hosted by
The Acoustical Society of China
Nanjing university
Suzhou Municipal People's Government
Nanjing university
Suzhou Municipal People's Government
Organized by
Suzhou Science and Technology Bureau
Suzhou Industry and Information Bureau
Changshu People's Government
Suzhou Industry and Information Bureau
Changshu People's Government
Contacts
Michael Chen:13906133069 1661845543@qq.com
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